Atlas Technologies Product Guides Feb. 2014 | Page 4

Aluminum's Extreme Vacuum Performance Potential The Atlas Aluminum Revolution The Atlas Aluminum Revolution... aluminum’s machinability; reduced outgassing volume and surface area; fast cycling, bakeout and pump-down times; reduced footprint and smaller/lighter support structures; reduced shipping cost; and lower disposal costs when dealing with nuclear activation applications. Any single physical or chemical property of aluminum may be enough reason to select aluminum as a vacuum chamber choice over stainless steel. But when looked at in summary, aluminum overwhelmingly surpasses stainless steel as providing the lowest cost of ownership. Aluminum’s properties, when looked at in sum, offer many compelling physical and cost of ownership advantages over stainless steel. Why choose Aluminum? • Low Outgassing • Low Contamination • High Thermal Conductivity • High Vibration Dampening • Superb Machinability • Space and Weight Reduction • Low Nuclear Activation • Low Magnetic Permeability • High Chemical Resistance • Low Cost of Ownership  Chen, J.R. et al. Thermal Outgassing from Aluminum Alloy Vacuum Chambers. Journal of Vacuum Science and Technology A 3. p. 2188. (1) (2)  O’Hanlon, John. Ultrahigh Vacuum in the Semiconductor Industry, Journal of Vacuum Science and Technology A 12, p. 921. 4 Atlas Technologies Aluminum has seven orders of magnitude less hydrogen than stainless steel. It has very low levels of Carbon, resulting in significantly less H2O, CO, C2 and Ch4 than stainless steel. Aluminum vacuum systems require far less pumping than comparably equipped stainless steel chambers. A baked aluminum chamber has an outgassing rate of less than 1x10–13 Torr liter/sec cm2 compared to Stainless' 6.3 x10–11 Torr liter/sec cm2 (1). With low nuclear activation, aluminum has a short neutron activated half-life measured on a scale of hours—significant when compared to stainless steel’s scale, which is measured in thousands of years. This offers huge disposal savings and a priceless reduction in potential exposure to staff. Aluminum is essentially magnetically transparent (non-magnetic). An aluminum UHV chamber’s low magnetic permeability offers no measurable disruption to electron and ion optics. With a low Young’s’ modulus (69GPa) of elasticity (1/3 that of stainless steel, 207GPa) aluminum offers outstanding vibration dampening, making it the material of choice for precision synchrotron, semiconductor and physics applications where excess vibration can have disastrous consequences. An aluminum chamber processed according to Atlas specification AVSP-08, entails cleaning and baking surfaces to facilitate the formation of a dense oxide passivation layer through the conversion of hydroxides into stable oxide molecules. The resulting surface inhibits the diffusion of other