A New Nanoparticle Characterization Technology for CMP Slurries A New Nanoparticle Characterization Technology for

A New Nanoparticle Characterization Technology
for CMP Slurries
Siqin He 1 , Derek Oberreit 1 , Gary Van Schooneveld 2 , David Blackford 1
1 Kanomax
FMT, Inc., White Bear Lake, Minnesota, United States
2 CT Associates, Inc., Eden Prairie, Minnesota, United States